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PVD Magnetron RF Sputtering
Thin film deposition of boron nitrides and carbon thin films
This system has a 3" sputter gun with scope for 2 additional guns to be added, a heated rotating plate to 550C, Ar and Nitrogen MFCs and a central computer control system.
​CVD System
Plasma System
​Probe Station (3 probes)
UV-Visible Spectrophotometer
The V-730 UV-visible spectrophotometer is designed to be simple to use with precise results, with 1 nm spectral bandwidth for high resolution and a linear dynamic range to over 3 AU across the entire spectrum. The wide wavelength range from 190 to 1100 nm offers versatile measurement for many different applications.
Solartron Impedance Analyzer With High Impedance Dielectric Interface
High temperature and vacuum testing capability
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